M04100 - SEMI M41 - 電源デバイス／IC用シリコン・オン・インシュレーター（SOI）の仕様 StdPbc-1016 This Guide should be used

This Guide should be used in conjunction with SEMI F63 and SEMI F75

It expands the GEM standard requirements and capabilities in the areas of state models (TSC

An EPT state model that defines triggers for state changes

Equipment (through reference to SEMI E78)

M04100 - SEMI M41 - 電源デバイス／IC用シリコン・オン・インシュレーター（SOI）の仕様 StdPbc-1016 This Guide should be usedglobal Silicon Wafer Committee2007425global Audits and Reviews Subcommittee20076www. semi. org20077CD ROM20006200111 ICSOI Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M34 Guide for Specifying SIMOX Wafers SEMI M53 Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Polystyrene Latex Spheres on Unpatterned