C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive To accelerate improvements of packaged

To accelerate improvements of packaged MEMS devices

and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods

determined by doping with carbon

This test method may provide guidelines for the application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time

C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive To accelerate improvements of packagedThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at www. semi. org in February 2006. Originally published 1978; previously published June 1999. NOTICE: This document was completely rewritten in 2006. The purpose of this document is to standardize requirements for dichloromethane (methylene