F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems Revision:SEMI F31-0313 - Superseded 3 — Guide for Ultrahigh

3 — Guide for Ultrahigh Purity Deionized Water and Chemical Distribution Systems in Semiconductor Manufacturing Equipment

previously published March 2006

and qualification methods for liquid chemical blending equipment

independent of which process module the current event report represents

F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems Revision:SEMI F31-0313 - Superseded 3 — Guide for UltrahighNOTICE: This Standard was completely rewritten in 2024. 1 Purpose 1. 1 This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS. 2 Scope 2. 1 This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes. Referenced Standards and Documents (purchase separately) SEMI F39 Guide for