Tylan FC-2952MEP5-T Mass Flow Controller AMAT 3030-04111 50SCCM CF4 Used Working It was removed from an

It was removed from an AIT 2 tool

Model No: ION IMPLANT SOURCE/HOUSING

Part No: BS90D

Estimated Packed Shipping Dimensions: L x W x H = 36"x24"x14" @ 60 lbs

Tylan FC-2952MEP5-T Mass Flow Controller AMAT 3030-04111 50SCCM CF4 Used Working It was removed from anTylan FC 2952MEP5 T Mass Flow Controller AMAT 3030 04111 50SCCM CF4 Used Working Inventory # A290105 This Tylan FC 2952MEP5 T is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: FC 2952MEP5 T Model No: 2900 Series AMAT No: 3030 04111 Range Gas: 50 SCCM, CF4 Interface: 9 Pin D Connector: 4VCR (1 4") May Require Calibration Sale Details Item Condition: Used Working, 90 Day