MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance Revision:SEMI MS4-1113 - Superseded 9997% quality

9997% quality

1-0414 - EQUIPMENT SELF DESCRIPTION(EqSD)의 SOAP 바인딩 규격

SEMI MF1530-02 (first SEMI publication)

SEMI E96-1101 (technical revision)

MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance Revision:SEMI MS4-1113 - Superseded 9997% qualityThe absence of a generally accepted method to determine Youngs modulus has provided a challenge to the microelectromechanical systems (MEMS) community for many years. Without a standard measurement technique, measurements between different laboratories cannot be meaningfully compared. This Standard provides a test method to determine Youngs modulus for thin, reflecting films, based on the average resonance frequency of a single layered cantilever. It