S00300 - SEMI S3 - 製程液體加熱系統安全基準 StdTpc-Surface Mount Gas Distribution Systems ナット，グリッパ等のような部分は，フロロカーボン材質で作成されなくてもよい。

ナット，グリッパ等のような部分は，フロロカーボン材質で作成されなくてもよい。

The user should investigate metrology suppliers’ current capabilities

3  This Guide also applies to wafers or other geometrical shapes of any material type that show deflections more than 200% of the allowable bow tolerance when tested for bow using the conventional three-point mounting method

マーキングシンボルは，新品基板からフルにパターン化済みの基板まで，

S00300 - SEMI S3 - 製程液體加熱系統安全基準 StdTpc-Surface Mount Gas Distribution Systems ナット，グリッパ等のような部分は，フロロカーボン材質で作成されなくてもよい。NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. 1PLHSSEMI S10SEMI S14 PLHSPLHSSEMI S10SEMI S14 PLHSSEMI S10SEMI S14 Referenced SEMI Standards None.