AlN Template on Sapphire(0001) 2"x 0.5mm, two sides polished, AlN film: 1000nm Cold high efficiency

high efficiency

Orientation:                      (100)+/- 0

Multi-position adjustable                 Using as a Vertical furnace              Fixing Knobs for Position Adjustment

1mm Gas Consumption 490ml/stroke Clean Room Compatibility 1000 grade cleanroom compatible Compressive Gas

AlN Template on Sapphire(0001) 2"x 0.5mm, two sides polished, AlN film: 1000nm Cold high efficiencyAlN Template on saphhire is made by a Plasma Vapor Deposition of NanoColumns (PVDNC) based method. AlN template is a cost effective way to replace AlN single crystal substrate. Specifications Sizes: 2" round Substrate Sapphire Orientation: C plane 0. 20 offcut towards m plane Type and Doping for the AlN film Undoped Macro Defect Density: <5 cm 2 Front Surface Finish (Al Face): As grown Back Surface Finish Sapphire: as received finish Useable Surface